Industries worldwide face increasing pressure to improve product quality, accelerate R&D, and reduce waste, all while grappling with skilled labor shortages. This drives a critical need for automated, high-precision inspection tools that can reveal hidden defects and material properties. Regulatory demands for product safety and performance also push for more rigorous, non-invasive analytical methods, making advanced imaging solutions like this essential for maintaining competitive advantage and meeting market expectations.
Significantly Enhances Dynamic Range and Detection Sensitivity: Captures weak signals with high precision, enabling detailed analysis of a wide range of samples beyond conventional phase imaging limitations.
Achieves High-Contrast Imaging with Dark-Field Optics: Removes non-scattered light components, clearly visualizing internal structures and subtle changes in transparent samples for high contrast.
Acquires High-Precision Phase Distribution via Complex Amplitude Synthesis: Combines spatial light modulator data with hologram information to provide accurate phase distribution beyond conventional limits.
This patent protects a phase imaging apparatus and method that improves dynamic range and detection sensitivity by integrating a spatial light modulator, dark-field optics, an image sensor, and a computational processor. With 12 claims covering multiple key components and processing steps, the patent has withstood examiner scrutiny, indicating a robust and difficult-to-invalidate scope of protection.
This patent primarily covers the core optical and computational method for phase imaging. White space exists in developing specific application-layer software, integrating with other sensor modalities (e.g., spectroscopy), or applying advanced AI for automated defect classification and predictive analytics.
Applying this technology to semiconductor manufacturing inspection could reduce fine defect and stress distribution detection, cutting the defect rate from 10% to 3% (a 7% reduction). For a line with $66.5M (AI est.) annual production value, this could save ~$4.5M (AI est.) in waste loss annually. Additionally, improved precision could shorten inspection time by 15%, saving ~$0.2M (AI est.) from a $1.5M (AI est.) annual inspection labor cost. Total estimated economic impact is ~$5M/year (AI est.).
X: Resolution & Detail
Y: Measurement Dynamic Range